Title :
Processing and characteristics of piezoelectric microcantilevers without substrate
Author :
Cao, Ziping ; Zhang, Jinya ; Kuwano, Hiroki
Author_Institution :
Dept. of Nanomech., Tohoku Univ., Sendai, Japan
Abstract :
Based on a 4 μm thick PZT films with (100) orientation, piezoelectric microcantilevers without a substrate support (free-stand) were fabricated with a typical micromachining process. These microcantilevers have low natural frequency which is suitable for the application on vibration energy harvesting. Simultaneously, their large linear displacement induced by voltage indicates they are also good microactuators, and the calculated piezoelectric coefficient d31 is one of third of that of bulky PZT ceramics.
Keywords :
cantilevers; lead compounds; microactuators; oxygen compounds; piezoelectric devices; zirconium compounds; PZT; bulky ceramics; linear displacement; low natural frequency; microactuators; piezoelectric microcantilevers; size 4 mum; typical micromachining process; vibration energy harvesting; lead zirconate titanate (PZT); microcantilevers; micromaching; thick films;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
Conference_Location :
Xiamen
Print_ISBN :
978-1-4244-6543-9
DOI :
10.1109/NEMS.2010.5592254
