A latching bistable microswitch using dual-beam electrothermal actuation

This paper reports on design and mechanical characteristic of a latching bistable microswitch with a dual-beam electrothermal actuator. As designed two novel contact pair, a stable state can be acquired without continuous power. The bistable mechanical characteristic of the switch is measured by a bonding strength tester. Testing results are in good agreement with theoretic analysis. The optical micrographs clearly indicate that the switch can stay latched in its two states. This novel design provides an excellent alternative for power and communication applications.