A micromachined piezoelectric PZT-based cantilever in d33 mode

Author

Che, Lingjuan ; Halvorsen, Einar ; Chen, Xuyuan ; Yan, Xin

Author_Institution

Fac. of Sci. & Eng., Vestfold Univ. Coll., Horten, Norway

fYear

2010

fDate

20-23 Jan. 2010

Firstpage

785

Lastpage

788

Abstract

This paper presents the design and analysis of a piezoelectric lead zirconate titanate (PZT) thin film microcantilever operating in d₃₃ mode. The modal and harmonic response analysis of the PZT/ZrO₂/SiO₂/Si cantilever beam structure was implemented using the ANSYS software. The simulation results showed the dimensions of the cantilever and the interdigital electrode in terms of resonance frequency and generated output, respectively. The resonance frequencies of the structure were in the range of 3-18.6 kHz through the beam length from 2000 μm to 200 μm. The fabrication process of the cantilever was presented in detail with attention to the sol-gel process of both PZT and ZrO₂ films. The PZT thin films exhibit good ferroelectric properties with a remnant polarization of 20 μC/cm².

Keywords

beams (structures); cantilevers; micromechanical devices; piezoelectric thin films; ANSYS software; PZT; Si; SiO₂; ZrO₂; d₃₃ mode; fabrication process; ferroelectric properties; frequency 3 kHz to 18.6 kHz; harmonic response analysis; interdigital electrode; micromachined piezoelectric PZT based cantilever; piezoelectric lead zirconate titanate thin film microcantilever; size 2000 micron to 200 micron; sol-gel process; PZT; cantilever; modeling; sol-gel;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on

Conference_Location

Xiamen

Print_ISBN

978-1-4244-6543-9

Type

conf

DOI

10.1109/NEMS.2010.5592273

Filename

5592273