Title :
Optimization design of an electrostatically suspended microgyroscope
Author :
Cui, Feng ; Chen, Wenyuan ; Zhang, Weiping ; Qin, Zhenni ; Ma, Gaoyin ; Xiao, Qijun ; Wu, Xiaosheng ; Liu, Wu
Author_Institution :
Key Lab. for Thin Film & Microfabrication Technol. of Minist. of Educ., Shanghai Jiao Tong Univ., Shanghai, China
Abstract :
A micromachined electrostatically suspended gyroscope (MESG), with a wheel-like rotor housed by stator electrodes, using LIGA-type microfabrication technology, was presented. Based on two capacitive detecting schemes, where common electrodes are used as signal pickoff and excitation, respectively, a unified multi-objective optimization design model of the structural parameters of the MESG is established. Employing goal attainment method, two optimization design examples using UV-LIGA and x-LIGA technology are given. An initial prototype of the designed microgyroscope was fabricated using UV-LIGA technology.
Keywords :
LIGA; gyroscopes; micromachining; microsensors; optimisation; rotors; stators; LIGA-type microfabrication technology; UV-LIGA technology; capacitive detection; electrostatically suspended microgyroscope; micromachined electrostatically suspended gyroscope; multiobjective optimization design model; stator electrode; structural parameter; wheel-like rotor; x-LIGA technology; LIGA-type; electrostatically suspended; microgyroscope; multi-objective; optimization design;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
Conference_Location :
Xiamen
Print_ISBN :
978-1-4244-6543-9
DOI :
10.1109/NEMS.2010.5592276
