Hot-carrier luminescence measurements by means of laser scanning microscopy

Author

Zappa, R. ; Zappa, F. ; Ghioni, M. ; Drodofsky, U.

Author_Institution

Politecnico di Milano, Italy

fYear

2000

fDate

2000

Abstract

We employed for the first time solid-state single photon avalanche detectors (SPADs) in a laser scanning microscope (LSM). These devices led to an improvement of the LSM performances in the inspection of microelectronic devices and circuits, enhancing the obtainable depth discrimination and contrast of the final image. Thanks to the high sensitivity of SPAD devices, it was also possible to envisage an innovative application of LSM for measuring the weak visible and near-infrared luminescence emitted by microelectronic devices

Keywords

automatic optical inspection; avalanche photodiodes; fault diagnosis; hot carriers; integrated circuit measurement; measurement by laser beam; optical microscopy; SPADs; contrast; hot-carrier luminescence measurements; inspection; laser scanning microscopy; microelectronic circuits; near-infrared luminescence; obtainable depth discrimination; single photon avalanche detectors; weak visible luminescence; Focusing; Hot carriers; Inspection; Luminescence; Microelectronics; Optical microscopy; Optical sensors; Solid lasers; Solid state circuits; Surface emitting lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Devices, Circuits and Systems, 2000. Proceedings of the 2000 Third IEEE International Caracas Conference on

Conference_Location

Cancun

Print_ISBN

0-7803-5766-3

Type

conf

DOI

10.1109/ICCDCS.2000.869857

Filename

869857