Title :
Wafer-Fusion-Enabled Platforms for Mid-Infrared Integrated Silicon Photonics
Author :
Chiles, Jeff ; Khan, Sharifullah ; Fathpour, Sasan
Author_Institution :
Coll. of Opt. & Photonics, Univ. of Central Florida, Orlando, FL, USA
Abstract :
The prospects of three newly developed platforms for broadband mid-infrared integrated silicon photonics (namely, silicon-on-nitride, the all-silicon optical platform and silicon-on-lithium niobate) enabled by the process of wafer fusion are investigated.
Keywords :
elemental semiconductors; infrared spectra; integrated optics; lithium compounds; niobium compounds; nitrogen; optical materials; optical waveguides; silicon; wafer bonding; Si-LiNbO3; Si-N; all-silicon optical platform; broadband midinfrared integrated silicon photonics; silicon-on-lithium niobate; silicon-on-nitride; wafer-fusion-enabled platforms; Biomedical optical imaging; Integrated optics; Optical device fabrication; Optical ring resonators; Optical waveguides; Photonics; Silicon; integrated optics; integrated optics materials; optoelectronics; waveguides;
Conference_Titel :
Photonics Society Summer Topical Meeting Series, 2014 IEEE
Conference_Location :
Montreal, QC
Print_ISBN :
978-1-4799-2766-1
DOI :
10.1109/SUM.2014.35
