Title :
Low-Loss Aluminium Nitride Thin Film for Mid-Infrared Waveguiding
Author :
Pao Tai Lin ; Hojoong Jung ; Kimerling, Lionel C. ; Agarwal, Abhishek ; Tang, Hong X.
Author_Institution :
Dept. of Mater. Sci., Massachusetts Inst. of Technol., Cambridge, MA, USA
Abstract :
Mid-infrared micro photonic devices including straight/bent waveguides and Y-junction beam splitters are developed on CMOS-compatible AlN-on-silicon platform. A low optical loss of 0.83 dB/cm and efficient 50:50 beam splitting ratio is achieved at λ=2.5 μm.
Keywords :
CMOS integrated circuits; III-V semiconductors; aluminium compounds; integrated optics; micro-optics; optical beam splitters; optical films; optical losses; optical waveguides; semiconductor thin films; silicon; wide band gap semiconductors; AlN-Si; CMOS-compatible AlN-on-silicon platform; Y-junction beam splitters; beam splitting ratio; bent waveguides; low-loss aluminium nitride thin film; microphotonic devices; midinfrared waveguiding; optical loss; straight waveguides; wavelength 2.5 mum;
Conference_Titel :
Photonics Society Summer Topical Meeting Series, 2014 IEEE
Conference_Location :
Montreal, QC
Print_ISBN :
978-1-4799-2766-1
DOI :
10.1109/SUM.2014.29
