Miniature 60-GHz-band bandpass filter with 2.55-dB insertion-loss using standard 0.13 µm CMOS technology

In this paper, we demonstrate a miniature low-insertion-loss 60-GHz-band bandpass filter by standard 0.13 mum CMOS technology. Low-insertion-loss is achieved by adopting thick microstrip-line (MSL) with optimized ground-plane pattern as the needed inductors to minimize the metal and substrate loss. This filter achieved insertion-loss (1/S₂₁) lower than 3 dB over the frequency range of 56.9-68.6 GHz, input return loss (S₁₁) better than -10 dB over the frequency range of 53.4-71.9 GHz, and output return loss (S₂₂) better than -10 dB over the frequency range of 53.2-70.9 GHz, and small group-delay-variation of plusmn3.25 ps over the frequency range of 52-72 GHz.The minimum insertion-loss was 2.55 dB at 62.5 GHz. To the authors´ knowledge, this is the best result ever reported for a 60-GHz-band CMOS bandpass filter in the literature. The chip area was only 0.175times0.194 mm², i.e. 0.034 mm², excluding the test pads.