Cantilever-resonators integrated with a dual-functional heater for ultra-sensitive and rapid bio/chemical detection

Reported here is a high-performance resonant micro-cantilever sensor with integrated micro-heater for both optimal resonance-excitation and speed-up analyte desorption after detection. By optimized designing the integrated heating-resistor, ultra-stable resonant frequency is measured that helps to realize a high resolution of mass detection. 130fg mass resolution is realized in atmospheric air with a specific biotin-avidin experiment. When the cantilever is used for on-the-spot gas sensing, heating the cantilever also helps to speed-up de-sorption of the target gas molecules for rapid signal recovery after onetime detection. Repeated detection experiment for DMMP vapor has proved that the signal can recover in less than one minute.