DocumentCode
2431612
Title
Modelling 3D fluctuation effects in highly scaled VLSI devices
Author
Linton, T.D., Jr. ; Shaofeng Yu ; Shaheed, R.
Author_Institution
CAD Div., Intel Technol., Santa Clara, CA, USA
fYear
2000
fDate
22-25 May 2000
Firstpage
45
Lastpage
46
Abstract
VLSI device scaling is increasing the importance of fluctuation effects. The strong 3D nature of these effects, together with decreasing device size, makes 3D modelling essential. In this paper, 3D simulation is used to study four important phenomena in small MOSFETs.
Keywords
MOSFET; VLSI; fluctuations; semiconductor device models; 3D fluctuation effects; MOSFET; VLSI device scaling; simulation model; Alpha particles; Degradation; Doping; Educational institutions; Fluctuations; MOSFETs; Performance loss; Resistors; Resource description framework; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Computational Electronics, 2000. Book of Abstracts. IWCE Glasgow 2000. 7th International Workshop on
Conference_Location
Glasgow, UK
Print_ISBN
0-85261-704-6
Type
conf
DOI
10.1109/IWCE.2000.869914
Filename
869914
Link To Document