A MEM actuator based on a membrane, controlled by an external heath source

Author

Tecpoyotl-Torres, M. ; Murphy-Pérez, E. ; Varona-Salazar, J. ; Hamoui, Anas A.

Author_Institution

Centro de Investig. en Ing. y Cienc. Aplic., UAEM, Cuernavaca

fYear

2008

fDate

21-23 July 2008

Firstpage

29

Lastpage

30

Abstract

The MEM actuator is controlled by an external heat source, such as the heat gradients present in some electronic systems. As the substrate bottom is heated, the thermal expansion rises the membrane, which can be used as an actuator. The analysis was realized by means of mechanical and thermal properties of materials. We also present the effect of the physical dimensions of the walls and, thickness and the length of the membrane. The process was simulated in COMSOL multiphysics. The membrane central deflection results, using different membrane materials, had been shown the use of Cr membrane as the best choice.

Keywords

chromium; heat transfer; membranes; micro-optics; microactuators; thermal expansion; COMSOL multiphysics; Cr membrane; MEM actuator; external heat source; thermal expansion; Actuators; Biomembranes; Chromium; Geometry; Heat transfer; Mechanical factors; Shape; Silicon; Temperature control; Thermal expansion;

fLanguage

English

Publisher

ieee

Conference_Titel

IEEE/LEOS Summer Topical Meetings, 2008 Digest of the

Conference_Location

Acapulco

ISSN

1099-4742

Print_ISBN

978-1-4244-1925-8

Electronic_ISBN

1099-4742

Type

conf

DOI

10.1109/LEOSST.2008.4590473

Filename

4590473