Title :
A MEM actuator based on a membrane, controlled by an external heath source
Author :
Tecpoyotl-Torres, M. ; Murphy-Pérez, E. ; Varona-Salazar, J. ; Hamoui, Anas A.
Author_Institution :
Centro de Investig. en Ing. y Cienc. Aplic., UAEM, Cuernavaca
Abstract :
The MEM actuator is controlled by an external heat source, such as the heat gradients present in some electronic systems. As the substrate bottom is heated, the thermal expansion rises the membrane, which can be used as an actuator. The analysis was realized by means of mechanical and thermal properties of materials. We also present the effect of the physical dimensions of the walls and, thickness and the length of the membrane. The process was simulated in COMSOL multiphysics. The membrane central deflection results, using different membrane materials, had been shown the use of Cr membrane as the best choice.
Keywords :
chromium; heat transfer; membranes; micro-optics; microactuators; thermal expansion; COMSOL multiphysics; Cr membrane; MEM actuator; external heat source; thermal expansion; Actuators; Biomembranes; Chromium; Geometry; Heat transfer; Mechanical factors; Shape; Silicon; Temperature control; Thermal expansion;
Conference_Titel :
IEEE/LEOS Summer Topical Meetings, 2008 Digest of the
Conference_Location :
Acapulco
Print_ISBN :
978-1-4244-1925-8
Electronic_ISBN :
1099-4742
DOI :
10.1109/LEOSST.2008.4590473
