Title :
Design and fabrication of a MEMS thermal actuator for 3D optical switching applications
Author :
Varona, Jorge ; Tecpoyotl-Torres, Margarita ; Escobedo-Alatorre, Jesus ; Hamoui, Anas A.
Author_Institution :
Centro de Investig. en Ing. y Cienc. Aplic., Univ. Autonoma del Estado de Mexico (UAEM), Toluca
Abstract :
This paper presents a novel thermally-actuated vertical micromirror for optical communications. Fabricated in a standard surface micromachining process, this micromirror can achieve low insertion loss (< 1 dB) and is capable of operating at CMOS-compatible voltage levels. It has a measured maximum power consumption of only 50-mW and a switching speed in the order of 16 ms with 5-V drive.
Keywords :
CMOS integrated circuits; microactuators; micromachining; micromirrors; optical switches; 3D optical switching; CMOS-compatible voltage levels; MEMS thermal actuator; optical communications; surface micromachining; vertical micromirror; Actuators; Communication switching; Insertion loss; Micromachining; Micromechanical devices; Micromirrors; Optical design; Optical device fabrication; Optical fiber communication; Optical losses;
Conference_Titel :
IEEE/LEOS Summer Topical Meetings, 2008 Digest of the
Conference_Location :
Acapulco
Print_ISBN :
978-1-4244-1925-8
Electronic_ISBN :
1099-4742
DOI :
10.1109/LEOSST.2008.4590474
