Title :
Sensitivity characteristics of Ag doped BaTiO3-CuO mixed oxide as carbon-dioxide sensor
Author :
Rudraswamy, S.B. ; Basu, Palash Kumar ; Bhat, Nagaraj
Author_Institution :
Dept. of Electr. Commun. Eng., IISc, Bangalore, India
Abstract :
Ag doped BaTiO3-CuO mixed oxide thin films are evaluated for their carbon-dioxide sensing characteristics. The metal oxide films of different thicknesses are deposited on oxidized p type Si <;100> substrate by RF Sputtering. Sensing characteristics for different CO2 concentration, (300 ppm - 1000 ppm) are obtained for different operating temperatures, (100° C - 400° C). Optimum temperature for maximum sensitivity is found to be 250° C. The effect of annealing on sensing properties is also evaluated. The unannealed films give better sensitivity than that of annealed films. Response time and recovery time are also calculated.
Keywords :
annealing; barium compounds; carbon compounds; copper compounds; gas sensors; silver; sputter deposition; thin films; Ag doped BaTiO3-CuO mixed oxide; CO2; CuO-BaTiO3:Ag; RF sputtering; Si; annealing; carbon-dioxide sensor; films thicknesses; metal oxide films; oxidized p type Si <;100> substrate; recovery time; response time; sensitivity characteristics; temperature 100 degC to 400 degC; Acceleration; Carbon dioxide; Films; Sensitivity; Sensors; Three-dimensional displays; X-ray scattering; BaTiO3-CuO; Carbon dioxide; Gas sensor;
Conference_Titel :
Electronics, Computing and Communication Technologies (IEEE CONECCT), 2014 IEEE International Conference on
Conference_Location :
Bangalore
Print_ISBN :
978-1-4799-2318-2
DOI :
10.1109/CONECCT.2014.6740279
