A MEMS electrostatic resonator for a fast-scan STM system

Author

Liao, Hsin-Hung ; Shen, Hsin-Hong ; Liao, Bo-Ting ; Yang, Yao-Joe ; Chen, Yu-Chun ; Pai, Woei-Wu

Author_Institution

Dept. of Mech. Eng., Nat. Taiwan Univ., Taipei, Taiwan

fYear

2010

fDate

20-23 Jan. 2010

Firstpage

549

Lastpage

552

Abstract

In this work, we report the development of a MEMS electrostatic resonator used as the actuator for a fast-scan STM system (FS-STM). The FS-STM requires an actuator which can oscillate with a relatively large amplitude (>3 μm) at a resonant frequency of larger than 10 kHz, which cannot be achieved by using piezoelectric actuators. Under ambient pressure, the measurement results show that the oscillating amplitude of the proposed electrostatic actuator is about 3.1 μm at 11.8 kHz. This resonator will be used to generate the scanning motion of the tip in lateral direction, which might significantly improve the scanning rate of a typical radio-frequency STM.

Keywords

electrostatic actuators; micromechanical resonators; scanning tunnelling microscopy; FS-STM; MEMS; ambient pressure; electrostatic actuator; electrostatic resonator; fast-scan STM system; frequency 11.8 kHz; oscillating amplitude; resonant frequency; Microresonators; microelectromechanical devices; scanning tunneling microscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on

Conference_Location

Xiamen

Print_ISBN

978-1-4244-6543-9

Type

conf

DOI

10.1109/NEMS.2010.5592458

Filename

5592458