Title :
A microelectromechanical digital-to-analog converter for generating step-motion of reference mirror in a white-light interferometry system
Author :
Liao, Hsin-Hung ; Yang, Yao-Joe
Author_Institution :
Dept. of Mech. Eng., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
In this work, we develop a microelectromechanical digital-to-analog converter (MEM-DAC) device which serves as a reference mirror with precise nanoscale step motion for a white-light interferometry system. The proposed mechanism converts a 4-bit digital signal to a mechanical out-of-plane displacement that is proportional to the analog value represented by the 4-bit binary code. A fabrication process which can realize a relatively large movable mirror without etching holes is proposed. Measured results are also presented.
Keywords :
digital-analogue conversion; light interferometry; micro-optomechanical devices; micromirrors; optical fabrication; MEM-DAC device; microelectromechanical digital-analog converter; reference mirror; white light interferometry system; Micromirror; digital-to-analog converter; microelectromechanical devices; white-light interferometer;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
Conference_Location :
Xiamen
Print_ISBN :
978-1-4244-6543-9
DOI :
10.1109/NEMS.2010.5592459
