DocumentCode
2432354
Title
A microelectromechanical digital-to-analog converter for generating step-motion of reference mirror in a white-light interferometry system
Author
Liao, Hsin-Hung ; Yang, Yao-Joe
Author_Institution
Dept. of Mech. Eng., Nat. Taiwan Univ., Taipei, Taiwan
fYear
2010
fDate
20-23 Jan. 2010
Firstpage
553
Lastpage
556
Abstract
In this work, we develop a microelectromechanical digital-to-analog converter (MEM-DAC) device which serves as a reference mirror with precise nanoscale step motion for a white-light interferometry system. The proposed mechanism converts a 4-bit digital signal to a mechanical out-of-plane displacement that is proportional to the analog value represented by the 4-bit binary code. A fabrication process which can realize a relatively large movable mirror without etching holes is proposed. Measured results are also presented.
Keywords
digital-analogue conversion; light interferometry; micro-optomechanical devices; micromirrors; optical fabrication; MEM-DAC device; microelectromechanical digital-analog converter; reference mirror; white light interferometry system; Micromirror; digital-to-analog converter; microelectromechanical devices; white-light interferometer;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
Conference_Location
Xiamen
Print_ISBN
978-1-4244-6543-9
Type
conf
DOI
10.1109/NEMS.2010.5592459
Filename
5592459
Link To Document