A microfabricated temperature sensor for hyperthermia

Author

Lin, Liwei ; Pei, Qiang ; Xu, Jiashan ; Guo, Hang

Author_Institution

Pen-Tung Sah Micro-Nano Technol. Res. Center, Xiamen Univ., Xiamen, China

fYear

2010

fDate

20-23 Jan. 2010

Firstpage

578

Lastpage

581

Abstract

In this paper, we present design and fabrication of a temperature sensor of Pt thin film for real time accurately measuring temperature in tumor hyperthermia. Processing parameters for using magnetron sputtering to deposit Pt thin film are obtained through many trial processes in order to get the excellent thin film surface morphology and sensing performance. With finite element analysis in ANSYS, it confirms that the sensor has a fast dynamic response in two special contact situations between tumor and sensor in hyperthermia. The tested results show the developed sensor has a good linear output relationship and its TCR reaches 0.0031/°C, which is close to the industry standard value of the bulk Pt resistor sensor.

Keywords

bioMEMS; finite element analysis; hyperthermia; metallic thin films; microfabrication; platinum; sputter deposition; surface morphology; temperature sensors; tumours; ANSYS; Pt thin film; bulk Pt resistor sensor; finite element analysis; magnetron sputtering; microfabricated temperature sensor; real time temperature measurement; thin film surface morphology; tumor hyperthermia;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on

Conference_Location

Xiamen

Print_ISBN

978-1-4244-6543-9

Type

conf

DOI

10.1109/NEMS.2010.5592468

Filename

5592468