DocumentCode :
2432557
Title :
The design optimization for GaN-based betavoltaic microbattery
Author :
Cheng, Zaijun ; San, Haisheng ; Yanfei Li ; Chen, Xuyuan
Author_Institution :
Pen-Tung Sah Micro-Nano Technol. Res. Center, Xiamen Univ., Xiamen, China
fYear :
2010
fDate :
20-23 Jan. 2010
Firstpage :
582
Lastpage :
586
Abstract :
In this paper, we demonstrate a p-n junction betavoltaic microbattery which is based on the wide-band gap material of GaN. Ni-63 was used as the pure beta radiant source. By the Monte Carlo (MC) simulation, the trajectories of single-energy electron beam incident on GaN target, the averaging penetration depth and the energy deposition along the penetration path were obtained. According to them, the optimal p-n junction depth was designed. To compare with the design, we have fabricated GaN betavoltaic cells using the metal-organic, chemical-vapor deposition (MOCVD) and the GaN micromachining technology. Under an activity of 11mCi Ni-63 source irradiation, the open circuit voltage of 25 mV and short circuit current of 2 nA were measured in a single 1*1 cm cell which are far apart from designed values 475 mV and 56 nA. Methods to further increase the performance of the GaN betavoltaic microbattery were discussed.
Keywords :
III-V semiconductors; MOCVD; Monte Carlo methods; gallium compounds; micromechanical devices; optimisation; p-n junctions; secondary cells; wide band gap semiconductors; GaN; Monte Carlo simulation; beta radiant source; betavoltaic cells; current 2 nA; energy deposition; energy electron beam; metal organic chemical vapor deposition; micromachining technology; optimal p-n junction depth; p-n junction betavoltaic microbattery; voltage 25 mV; wideband gap material; GaN; MOCVD; Monte Carlo Simulation; Ni-63; betavoltaic; microbattery;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
Conference_Location :
Xiamen
Print_ISBN :
978-1-4244-6543-9
Type :
conf
DOI :
10.1109/NEMS.2010.5592469
Filename :
5592469
Link To Document :
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