DocumentCode :
2432812
Title :
Structure-decoupled dual-mass MEMS gyroscope with self-adaptive closed-loop detection
Author :
Yin, Yong ; Wang, Shourong ; Wang, Cunchao ; Yang, Bo
Author_Institution :
Key Lab. of Micro-Inertial Instrum. & Adv. Navig. Technol., Southeast Univ., Nanjing, China
fYear :
2010
fDate :
20-23 Jan. 2010
Firstpage :
624
Lastpage :
627
Abstract :
The dual-mass double-linear vibrational gyroscopes are insensitive to the environment, and their differential outputs can effectively suppress the common mode interference. A structure-decoupled dual-mass MEMS(micro-electro-mechanical system) gyroscope is studied in this paper, which can realize the full decoupling of the driving mode and sensing mode. In order to improve the performance of the dual-mass MEMS gyroscope, a self-adaptive closed-loop detection method is developed. This method tunes the sensing-mode frequency to driving-mode frequency, achieves the driving and sensing modes matching, regulates the amplitudes of the sense axis to a constant value. The results of simulation and experiment indicate this self-adaptive closed-loop detection method makes the sensing mode oscillate in a given frequency and the amplitude to a fixed value for dynamic range and precision improvement. This detection method achieves translational acceleration elimination, cancels out quadrature error, improves the gyro´s total performances and achieves the ideal design purpose.
Keywords :
closed loop systems; gyroscopes; micromechanical devices; double-linear vibrational gyroscope; driving-mode frequency; micro-electro-mechanical system; self-adaptive closed-loop detection; sensing-mode frequency; structure-decoupled dual-mass MEMS gyroscope; Adaptive control; dual-mass; gyroscope; microelectromechanical system (MEMS) gyroscope;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
Conference_Location :
Xiamen
Print_ISBN :
978-1-4244-6543-9
Type :
conf
DOI :
10.1109/NEMS.2010.5592480
Filename :
5592480
Link To Document :
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