Research in a novel gyroscope based on double-barrier resonant tunneling diodes

Author

Li, Mengwei ; Du, Kang ; Wang, Ruirong ; Shi, Yunbo ; Liu, Jun

Author_Institution

Nat. Key Lab. for Electron. Meas. Technol., North Univ. of China, Taiyuan, China

fYear

2010

fDate

20-23 Jan. 2010

Firstpage

641

Lastpage

645

Abstract

Resonant tunneling diodes (RTDs) based on double-barrier structure have been proved to have negative differential resistance effect, and the current-voltage characteristics of RTDs are a function of stress. In order to study of the piezoresistive effect in RTDs for application in MEMS gyroscope, a novel structure with folding-type orthogonal beams is designed. This kind of gyroscope has been fabricated by GaAs surface micromachining processes and bulk micromachining technology. For testing the basic properties of gyroscope, the drive-feedback circuits and double-RTD Wheatstone bridge measurement system are established. The experimental results verify that the electromagnetism driven approach and the piezoresistive effect of RTD used in Coriolis effect detection are feasible.

Keywords

gyroscopes; micromachining; micromechanical devices; piezoresistance; resonant tunnelling diodes; GaAs surface micromachining process; MEMS gyroscope; bulk micromachining technology; current-voltage characteristics; double-RTD Wheatstone bridge measurement system; double-barrier resonant tunneling diodes; double-barrier structure; drive-feedback circuits; folding-type orthogonal beams; negative differential resistance effect; piezoresistive effect; Resonant tunneling diodes(RTDs); fabrication; gyroscope; measurement approach;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on

Conference_Location

Xiamen

Print_ISBN

978-1-4244-6543-9

Type

conf

DOI

10.1109/NEMS.2010.5592487

Filename

5592487