Title :
Research in a novel gyroscope based on double-barrier resonant tunneling diodes
Author :
Li, Mengwei ; Du, Kang ; Wang, Ruirong ; Shi, Yunbo ; Liu, Jun
Author_Institution :
Nat. Key Lab. for Electron. Meas. Technol., North Univ. of China, Taiyuan, China
Abstract :
Resonant tunneling diodes (RTDs) based on double-barrier structure have been proved to have negative differential resistance effect, and the current-voltage characteristics of RTDs are a function of stress. In order to study of the piezoresistive effect in RTDs for application in MEMS gyroscope, a novel structure with folding-type orthogonal beams is designed. This kind of gyroscope has been fabricated by GaAs surface micromachining processes and bulk micromachining technology. For testing the basic properties of gyroscope, the drive-feedback circuits and double-RTD Wheatstone bridge measurement system are established. The experimental results verify that the electromagnetism driven approach and the piezoresistive effect of RTD used in Coriolis effect detection are feasible.
Keywords :
gyroscopes; micromachining; micromechanical devices; piezoresistance; resonant tunnelling diodes; GaAs surface micromachining process; MEMS gyroscope; bulk micromachining technology; current-voltage characteristics; double-RTD Wheatstone bridge measurement system; double-barrier resonant tunneling diodes; double-barrier structure; drive-feedback circuits; folding-type orthogonal beams; negative differential resistance effect; piezoresistive effect; Resonant tunneling diodes(RTDs); fabrication; gyroscope; measurement approach;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
Conference_Location :
Xiamen
Print_ISBN :
978-1-4244-6543-9
DOI :
10.1109/NEMS.2010.5592487
