Title :
Effects of Mn doping concentrations on properties of ZnO thin films
Author :
Rashid, A.R.A. ; Menon, P.S.
Author_Institution :
Inst. of Microeng. & Nanoelectron. (IMEN), Univ. Kebangsaan Malaysia, Bangi, Malaysia
Abstract :
Undoped and Mn doped ZnO films with different doping concentration were synthesized by sol gel method using the spin coating technique. Zn1-xMnxO thin films are prepared using 2-methoxyethanol solution of zinc acetate dehydrate and manganese acetate tetrahydrate. The quantity of Mn in the sol was varied for each experiment with an annealing temperature of 500°C. As to investigate the physical properties and microstructures, the samples are characterized using FESEM. The surface morphology showed spherical shaped nanoparticles and separated uniformly on the films. The quality surface degraded by doping with Mn but at until 8% of Mn, the surface become smoother. Meanwhile, the optical properties were characterized using UV-Vis where the absorbance spectra were affected by certain amount of Mn concentration. Four point probe is used to measure the resistivities of the samples. These films achieve tunable band gap characteristics by means of changing the dopant concentration.
Keywords :
II-VI semiconductors; annealing; doping profiles; electrical resistivity; energy gap; field emission electron microscopy; manganese; nanoparticles; scanning electron microscopy; semiconductor doping; semiconductor growth; semiconductor thin films; sol-gel processing; spin coating; surface morphology; ultraviolet spectra; visible spectra; wide band gap semiconductors; zinc compounds; 2-methoxyethanol solution; Mn doping concentration effects; Zn1-xMnxO; absorbance spectra; annealing; band gap; field emission SEM; four point probe; manganese acetate tetrahydrate; microstructures; optical properties; physical properties; resistivity; sol-gel method; spherical shaped nanoparticles; spin coating; surface degradation; surface morphology; surface smoothness; temperature 500 degC; thin films; ultraviolet-visible spectra; zinc acetate dehydrate; Conductivity; Doping; Films; Manganese; Photonic band gap; Surface morphology; Zinc oxide; Zn1−xMnxO thin film; sol gel method;
Conference_Titel :
Micro and Nanoelectronics (RSM), 2011 IEEE Regional Symposium on
Conference_Location :
Kota Kinabalu
Print_ISBN :
978-1-61284-844-0
DOI :
10.1109/RSM.2011.6088342