Sub-Micron IDT Fabrication

Author

Den Berg, H. M Van ; Humphryes, R.F. ; Ruigrok, J.J.M. ; Venema, A.

fYear

1977

fDate

1977

Firstpage

767

Lastpage

769

Keywords

Acoustic transducers; Chromium; Delay lines; Electrodes; Fabrication; Frequency; Lenses; Microwave devices; Resists; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1977

Type

DOI

10.1109/ULTSYM.1977.196940

Filename

1533880

Link To Document