Title :
Sub-Micron IDT Fabrication
Author :
Den Berg, H. M Van ; Humphryes, R.F. ; Ruigrok, J.J.M. ; Venema, A.
Keywords :
Acoustic transducers; Chromium; Delay lines; Electrodes; Fabrication; Frequency; Lenses; Microwave devices; Resists; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 1977
DOI :
10.1109/ULTSYM.1977.196940
