Title :
Parameters estimation of the MEM transducer with electrodes produced from different materials
Author :
Dragunov, V.P. ; Lyutaeva, M.N.
Author_Institution :
Novosibirsk State Tech. Univ., Novosibirsk, Russia
Abstract :
The paper contains mathematical expressions for computation of output power for MEM transducer with electrodes produced from different materials. Dependence of transducer output power on resonance frequency and its dependence on difference between work functions of electrode materials are analyzed.
Keywords :
microelectrodes; microsensors; parameter estimation; work function; MEM transducer; electrode material analysis; mathematical expressions; parameter estimation; resonance frequency; work function; Capacitors; Chemicals; Electrodes; Packaging; Parameter estimation; Piezoelectric transducers; Power generation; Power system modeling; Seminars; Voltage; MEM transducer; Work function; output power;
Conference_Titel :
Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies, 2009. INTERNANO 2009. International School and Seminar on
Conference_Location :
Novosibirsk
Print_ISBN :
978-1-4244-5534-8
DOI :
10.1109/INTERNANO.2009.5335625
