Title :
Tubular micro- and nano- sensors and actuators for aerodynamics
Author :
Seleznev, Vladimir A. ; Prinz, Victor Ya ; Aniskin, Vladimir A. ; Shiplyuk, Alexander N.
Author_Institution :
Inst. of Semicond. Phys., SD RAS, Novosibirsk, Russia
Abstract :
New data on the fabrication and study of semiconductor micro- and nanotubes, and also on the application of such micro- and nanotubes as basic elements in sensors and actuators are reported. Fabrication methods for tubular micro- and nanosensors and actuators are described, and examples of fabricated devices are presented. The potential offered by the fabricated pilot devices in aerodynamic applications is demonstrated.
Keywords :
actuators; aerodynamics; flow measurement; microfluidics; microsensors; nanofluidics; nanosensors; semiconductor nanotubes; actuators; aerodynamics; microtubes; semiconductor nanotubes; tubular microsensors; tubular nanosensors; Actuators; Aerodynamics; Biosensors; Chemical and biological sensors; Fabrication; Nanobioscience; Nanoscale devices; Sensor arrays; Sensor phenomena and characterization; Thermal sensors; Heterofilm; hotwire anemometer; microtube; nanotube;
Conference_Titel :
Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies, 2009. INTERNANO 2009. International School and Seminar on
Conference_Location :
Novosibirsk
Print_ISBN :
978-1-4244-5534-8
DOI :
10.1109/INTERNANO.2009.5335627
