Title : 
Some new applications of physical chemistry to MEMS
         
        
        
            Author_Institution : 
Chem. Dept., Xiamen Univ., Xiamen, China
         
        
        
        
        
        
            Abstract : 
If the product generated at an electrode can be rapidly consumed through a homogeneous scavenging reaction, the product will be confined within a very thin diffusion layer surrounding the electrode surface, called "Electrochemical Reaction Layer". The surface tension between an aqueous solution and hydrophilic/hydrophobic solid surface provides a simpler way to control fluid movement in micro-systems. According to this principle, a novel integrated print head was developed by our research group. In order to mobilize or stop the fluids or biological entities in the BioMEMs system and μ-TAS, micro fluid actuator (micro pump) is needed as one of the key components.
         
        
            Keywords : 
bioMEMS; electrophoresis; microactuators; microfabrication; microfluidics; nanofabrication; osmosis; physical chemistry; surface tension; 3D complex micro/nano fabrication; MEMS; electro-osmosis; electrochemical reaction layer; microfluid actuator; microfluid dispenser; physical chemistry; surface tension;
         
        
        
        
            Conference_Titel : 
Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
         
        
            Conference_Location : 
Xiamen
         
        
            Print_ISBN : 
978-1-4244-6543-9
         
        
        
            DOI : 
10.1109/NEMS.2010.5592516