DocumentCode
2433495
Title
Effect of working fluid, acceleration and heater power on temperature profile inside a thermal convective accelerometer
Author
Ishak, Mohammad Zulfikar ; Sidek, Othman ; Aziz, Jalal Abdullah ; Mohd, Shukri Korakkottil Kunhi ; Miskam, Muhamad Azman
Author_Institution
Collaborative Microelectron. Design Excellence Centre (CEDEC), Univ. Sains Malaysia, Nibong Tebal, Malaysia
fYear
2011
fDate
28-30 Sept. 2011
Firstpage
334
Lastpage
338
Abstract
Convective accelerometer does not contain seismic mass and work based on free convection heat transfer of electrical heater inside a hermetic chamber. Its sensitivity is dependent to the temperature distribution of working fluid inside the hermetic chamber. In this paper, the effect of working fluid properties, acceleration and heater power on temperature profile inside the convective accelerometer hermetic chamber is presented. Convective accelerometers with various working fluids (air, carbon dioxide, water, nitrogen, argon, helium, and ethylene glycol), heater powers (0.1 to 1.0 watts), and accelerations (1 to 5 g) were simulated by using ConventorWare 2010 software. Result shows, without acceleration the temperature profile of working fluid is symmetry around the vertical axis in relation to the heat source while with acceleration, the temperature profile is slightly skewed towards the acceleration direction. Argon is the best candidate for working fluid because it produces the largest temperature difference between the left and the right sides of the heater which would result in high sensitivity accelerometer. Convective accelerometer sensitivity also can be enhanced by increasing heater power, using gas-phase working fluids and locating the temperature sensors in the range between 100 to 300 μm away from the heater.
Keywords
acceleration; accelerometers; argon; electric heating; flow simulation; flowmeters; microfluidics; natural convection; temperature distribution; temperature sensors; Ar; acceleration; convection heat transfer; convective accelerometer; electrical heater; gas phase working fluids; heat source; hermetic chamber; temperature distribution; temperature profile; temperature sensors; Acceleration; Accelerometers; Fluids; Heat transfer; Heating; Temperature measurement; Temperature sensors; CFD analysis; convective accelerometer; free convection analysis; thermal sensor;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro and Nanoelectronics (RSM), 2011 IEEE Regional Symposium on
Conference_Location
Kota Kinabalu
Print_ISBN
978-1-61284-844-0
Type
conf
DOI
10.1109/RSM.2011.6088355
Filename
6088355
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