• DocumentCode
    2433517
  • Title

    Process for the determination of thickness of polymeric microchannels for microfluidic applications

  • Author

    Yunus, Nurul Amziah Md ; Jaafar, Haslina ; Green, Nicolas G.

  • Author_Institution
    Dept. of Electr. & Electron. Eng., Univ. Putra Malaysia, Serdang, Malaysia
  • fYear
    2011
  • fDate
    28-30 Sept. 2011
  • Firstpage
    344
  • Lastpage
    348
  • Abstract
    We have developed a technique of fabricating device channels for microfludics system by using high performance epoxy polymeric based dry film resists (DFRs). We will use the fabrication method originated in silicon microelectronics fabrication industry. This is because the interest in this industry has made the current microfluidic devices fabricated not only from silicon substrate but also to a range of polymers and glasses. Our observations are made on the effect of the thickness before and after curing and bonding mechanism of DFR on glass substrate. Therefore the thickness of the channels is recorded. The outcomes of the bonding procedure are captured. These channels are patterned and sandwiched in between two glass substrates. They can be used for handling continuous fluid flow and particle. In our advance, the channel was formed for dielectrophoretic (DEP) colloidal particle separation systems.
  • Keywords
    elemental semiconductors; integrated circuit manufacture; integrated circuits; microfluidics; resists; silicon; Si; device channels fabrication; dielectrophoretic colloidal particle separation systems; epoxy polymeric based dry film resists; glasses; microelectronics fabrication industry; microfludics system; polymeric microchannels; polymers; thickness determination; Curing; Fabrication; Glass; Laminates; Microfluidics; Resists; Thickness measurement; Colloidal Particles; Dry Film Resist; Microfluidic; Separation; Thickness;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro and Nanoelectronics (RSM), 2011 IEEE Regional Symposium on
  • Conference_Location
    Kota Kinabalu
  • Print_ISBN
    978-1-61284-844-0
  • Type

    conf

  • DOI
    10.1109/RSM.2011.6088357
  • Filename
    6088357