DocumentCode
2433555
Title
Finite element analysis of a lateral microelectro-thermal actuator
Author
Aziz, A.A. ; Rahman, M.S. ; Aris, Hasnizah
Author_Institution
Fac. of Electr. Eng., Univ. Teknol. MARA, Shah Alam, Malaysia
fYear
2011
fDate
28-30 Sept. 2011
Firstpage
354
Lastpage
358
Abstract
This paper reports on research that designed, and characterized a lateral microelectro-thermal actuator using ANSYS in order to simulate. The aim of this study is mainly to compute and compare the blade tip displacement of the different materials at the same operation conditions when potential difference is applied across the electrical connection pads, resulting the total current and heat flow distributions all over the microelectro-thermal actuator.
Keywords
finite element analysis; microactuators; temperature sensors; ANSYS; blade tip displacement; current flow distributions; electrical connection pads; finite element analysis; heat flow distributions; lateral microelectro-thermal actuator; potential difference; Actuators; Electric potential; Finite element methods; Gold; Heating; Shape; Solid modeling;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro and Nanoelectronics (RSM), 2011 IEEE Regional Symposium on
Conference_Location
Kota Kinabalu
Print_ISBN
978-1-61284-844-0
Type
conf
DOI
10.1109/RSM.2011.6088359
Filename
6088359
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