Title :
Integrated Ultrasonic Transducer
Author :
Kwan, Sze-Hon ; White, Richard M. ; Muller, Richard S.
Keywords :
Acoustic transducers; FETs; Piezoelectric films; Piezoelectric transducers; Signal processing; Silicon; Surface acoustic waves; Transversal filters; Ultrasonic transducers; Zinc oxide;
Conference_Titel :
Ultrasonics Symposium, 1977
DOI :
10.1109/ULTSYM.1977.196956