DocumentCode
2433703
Title
Aging in Quartz SAW Resonators
Author
Shreve, William R.
fYear
1977
fDate
1977
Firstpage
857
Lastpage
861
Keywords
Aging; Etching; Frequency; Narrowband; Plasma applications; Plasma devices; Plasma materials processing; Plasma temperature; Surface acoustic waves; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 1977
Type
conf
DOI
10.1109/ULTSYM.1977.196959
Filename
1533899
Link To Document