Title :
High luminescence efficient Ga polarity domain GaN realized on Si(111) by MOVPE
Author :
Ghosh, Bablu K. ; Saad, Ismail ; Yamamoto, Akio
Author_Institution :
Dept. of Electr. & Electron. Eng., Univ. Malaysia Sabah, Kota-kinabalu, Malaysia
Abstract :
The stress and defect generation; hence luminescence efficiency of semiconductor materials is correlated. Even severe cracks are formed on the epilayer surface due to stress those impair the photoluminescence property of devices. So the stress effect of GaN epilayer grown on Si(111) is evaluated by different growth approaches and different interlayer´s. Epilayer on thinner converted SiC templates is found to increases PL Ex. peak energy with broadening its line width whereas epilayer grown on porously converted GaN layer is found comparatively low PL Ex. peak energy with narrowing its line width. From Raman scattering analysis, it is also observed that the PL Ex. peak is not signifies actual stress level rather its reveals epilayer quality. PL Ex. Peak energy is found to increase with increasing thickness of epilayer grown on converted interlayer on Si substrate.
Keywords :
III-V semiconductors; MOCVD; Raman spectra; gallium compounds; internal stresses; photoluminescence; semiconductor epitaxial layers; semiconductor growth; stress effects; vapour phase epitaxial growth; wide band gap semiconductors; GaN; GaN epilayer; MOVPE; Raman scattering analysis; Si; Si substrate; converted interlayer; defect generation; epilayer quality; epilayer surface; epilayer thickness; growth approaches; high luminescence efficient Ga polarity domain GaN; line width; luminescence efficiency; peak energy; photoluminescence property; porously converted GaN layer; semiconductor materials; severe cracks; stress effect; stress generation; stress level; thinner converted SiC templates; Gallium nitride; Lattices; Silicon; Silicon carbide; Strain; Stress; Substrates;
Conference_Titel :
Micro and Nanoelectronics (RSM), 2011 IEEE Regional Symposium on
Conference_Location :
Kota Kinabalu
Print_ISBN :
978-1-61284-844-0
DOI :
10.1109/RSM.2011.6088368