Abstract :
The following topics were dealt with: nanoelectronics; nanosensors; photodetectors; microfabrication; nanofabrication; microsensors; microactuators and nonvolatile RAM.
Keywords :
microactuators; microfabrication; microsensors; nanoelectronics; nanofabrication; nanosensors; photodetectors; random-access storage; microactuator; microfabrication; microsensors; nanoelectronics; nanofabrication; nanosensors; nonvolatile RAM; photodetectors;
Conference_Titel :
Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies, 2009. INTERNANO 2009. International School and Seminar on
Conference_Location :
Novosibirsk
Print_ISBN :
978-1-4244-5534-8
DOI :
10.1109/INTERNANO.2009.5335652
