• DocumentCode
    2434276
  • Title

    A-Si:H solar cells using the hot-wire technique-how to exceed efficiencies of 10%

  • Author

    Bauer, S. ; Herbst, W. ; Schroder, B. ; Oechsner, H.

  • Author_Institution
    Dept. of Phys., Kaiserslautern Univ., Germany
  • fYear
    1997
  • fDate
    29 Sep-3 Oct 1997
  • Firstpage
    719
  • Lastpage
    722
  • Abstract
    In this study we describe our latest efforts to improve the efficiency and stability of hot-wire (HW-) a-Si:H based solar cells by further optimizing p/i-interface and i-layer quality. In-situ ellipsometry has been used to determine the film microstructure (density, roughness) at the crucial p/i-interface and of the fully grown i-layers. A detailed investigation of the effect of varying the process gas pressure, p and filament temperature, Tfil enabled us to improve the interface and bulk i-layer quality significantly. The microstructure, especially at the p/i-interface but also of the i-layer, has been found to sensitively correlate with the cell performance. The resulting solar cells exhibited efficiencies as high as 9.7% although there are two “air breaks”, sputtered n-layers and simple evaporated aluminum rear contacts. Moreover, for the first time we report on results concerning the effect of hydrogen dilution on the stability of HW-a-Si:H i-layers and solar cells
  • Keywords
    amorphous semiconductors; elemental semiconductors; ellipsometry; hydrogen; plasma CVD; plasma CVD coatings; semiconductor growth; semiconductor thin films; silicon; solar cells; surface topography; Si:H; a-Si:H based solar cells; bulk i-layer quality; density; efficiency improvement; evaporated aluminum rear contacts; filament temperature; film microstructure; hot-wire technique; hydrogen dilution effects; i-layer quality optimisation; in-situ ellipsometry; microstructure; p/i-interface optimisation; process gas pressure variation; sputtered n-layers; stability improvement; surface roughness; Aluminum; Ellipsometry; Hydrogen; Microstructure; Optical films; Photovoltaic cells; Plasma temperature; Silicon; Stability; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photovoltaic Specialists Conference, 1997., Conference Record of the Twenty-Sixth IEEE
  • Conference_Location
    Anaheim, CA
  • ISSN
    0160-8371
  • Print_ISBN
    0-7803-3767-0
  • Type

    conf

  • DOI
    10.1109/PVSC.1997.654190
  • Filename
    654190