Title :
Fully coupled electro-thermal simulation of a micro pirani gauge
Author :
Jiang, Wei ; Zhou, Jilong ; Wang, Xin ; Wang, Long ; Zhang, Jinwen
Author_Institution :
Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China
Abstract :
In this paper, fully coupled electro-thermal simulation of a micro pirani gauge is presented. The simulation was carried out using CFD-ACE+ software, based on Finite Volume Method (FVM) for multi-disciplinary modeling. Temperature coefficient of resistance (TCR) of silicon was taken into account for solving the joule heating and heat transfer equations. The influence of physical parameters on the dynamic range and sensitivity of micro pirani gauges was systematically studied for optimization. The simulation result was compared with and corrected by the performance of the micro pirani gauge fabricated by bulk micromachining technology.
Keywords :
finite volume methods; heat transfer; micromachining; micromechanical devices; optimisation; sensitivity; vacuum gauges; vacuum measurement; ACE software; CFD software; bulk micromachining technology; electrothermal simulation; finite volume method; heat transfer equations; joule heating; micro pirani gauge; multi-disciplinary modeling; optimization; sensitivity; silicon; temperature coefficient of resistance; electro-thermal simulation; finite volume method; pirani gauge;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
Conference_Location :
Xiamen
Print_ISBN :
978-1-4244-6543-9
DOI :
10.1109/NEMS.2010.5592557
