Title :
Atmospherich pressure plasma jets: Concepts and realization of miniaturized jets and jet arrays
Author :
Theirich, D. ; Kedzierski, J. ; Engemann, J.
Author_Institution :
Forschungszentrum for Mikrostrukturtechnik, Univ. of Wuppertal, Freudenberg
Abstract :
Plasma jets presented here are based on cylindrical dielectric barrier discharges. Multi jet arrays formed from bundles of 6 and 10 individual single jets are realized in very compact housings. Surface treatments of polymers to increase their adhesion are discussed and compared to results achieved by other types of plasmas. A second type of ap plasma jet sources is based on an integrated ceramic technology. This technology can realize micro jets with diameters of a few hundred micrometers and a length of about 1 cm. All micro jets of an array can be manufactured in parallel with only a few fabrication steps. In the future also addressable micro jet arrays are conceivable which may be used for direct patterning of surfaces.
Keywords :
plasma jets; plasma materials processing; plasma sources; polymers; surface treatment; ap plasma jet sources; atmospheric pressure plasma jets; integrated ceramic technology; jet arrays; miniaturized jets; polymer surface treatments; Adhesives; Atmospheric-pressure plasmas; Ceramics; Dielectrics; Fault location; Plasma materials processing; Plasma sources; Polymers; Surface discharges; Surface treatment;
Conference_Titel :
Plasma Science, 2008. ICOPS 2008. IEEE 35th International Conference on
Conference_Location :
Karlsruhe
Print_ISBN :
978-1-4244-1929-6
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2008.4590623
