Title :
Closed Loop Control And Performance Of A Microactuator For Dual Stage Servo
Author :
Imaino, Wayne ; Hong, Jonggi ; Hirano, Takuichi ; Fan, Liang-Shih
Author_Institution :
IBM Almaden Res. Ctr.
Keywords :
Actuators; Bandwidth; Bonding; Disk drives; Electrostatics; Magnetic heads; Memory; Microactuators; Servomechanisms; Testing;
Conference_Titel :
MMM-Intermag Conference, 1998. Abstracts., The 7th Joint
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-5118-5
DOI :
10.1109/INTMAG.1998.735508
