Investigations of time-averaged electron energy and electron density for different radii and gas pressures in capacitively coupled neutral loop discharges (CCP-NLD)

Author

Vural, M. ; Sirin, F. ; Brinkmann, R.P.

Author_Institution

Theor. Electr. Eng., Ruhr-Univ.-Bochum, Bochum

fYear

2008

fDate

15-19 June 2008

Firstpage

1

Lastpage

1

Abstract

This paper investigates the behaviour of the time-averaged electron density and electron energy for neutral gas pressures between 0.5 Pa and 10 Pa, and for different radii between 5 cm and 20 cm of the neutral loop (NL). The particle-in-cell (PIC) simulation results of radially and axially resolved profiles are presented. The influence of the reactor geometry and gas pressure on the homogeneity and heating mechanism are also shown.

Keywords

electron density; high-frequency discharges; plasma density; plasma heating; plasma simulation; capacitively coupled neutral loop discharges; electron energy; gas pressure; heating; homogeneity; particle-in-cell simulation; pressure 0.5 Pa to 10 Pa; radius 5 cm to 20 cm; reactor geometry; time-averaged electron density; Acceleration; Coupling circuits; Electrodes; Electrons; Etching; Fabrication; Fault location; Inductors; Plasma sources; Radio frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 2008. ICOPS 2008. IEEE 35th International Conference on

Conference_Location

Karlsruhe

ISSN

0730-9244

Print_ISBN

978-1-4244-1929-6

Electronic_ISBN

0730-9244

Type

conf

DOI

10.1109/PLASMA.2008.4590637

Filename

4590637