Title :
Investigations of time-averaged electron energy and electron density for different radii and gas pressures in capacitively coupled neutral loop discharges (CCP-NLD)
Author :
Vural, M. ; Sirin, F. ; Brinkmann, R.P.
Author_Institution :
Theor. Electr. Eng., Ruhr-Univ.-Bochum, Bochum
Abstract :
This paper investigates the behaviour of the time-averaged electron density and electron energy for neutral gas pressures between 0.5 Pa and 10 Pa, and for different radii between 5 cm and 20 cm of the neutral loop (NL). The particle-in-cell (PIC) simulation results of radially and axially resolved profiles are presented. The influence of the reactor geometry and gas pressure on the homogeneity and heating mechanism are also shown.
Keywords :
electron density; high-frequency discharges; plasma density; plasma heating; plasma simulation; capacitively coupled neutral loop discharges; electron energy; gas pressure; heating; homogeneity; particle-in-cell simulation; pressure 0.5 Pa to 10 Pa; radius 5 cm to 20 cm; reactor geometry; time-averaged electron density; Acceleration; Coupling circuits; Electrodes; Electrons; Etching; Fabrication; Fault location; Inductors; Plasma sources; Radio frequency;
Conference_Titel :
Plasma Science, 2008. ICOPS 2008. IEEE 35th International Conference on
Conference_Location :
Karlsruhe
Print_ISBN :
978-1-4244-1929-6
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2008.4590637
