DocumentCode
2434921
Title
Improvement in the Resolution of the Reflective Scanning Acoustic Microscope Application to the Non Destructive Evaluation in Microelectronics
Author
Attal, J. ; Cambon, G.
fYear
1978
fDate
1978
Firstpage
212
Lastpage
214
Keywords
Absorption; Acoustic applications; Acoustic signal detection; Acoustic transducers; Frequency; Lenses; Liquids; Microelectronics; Microscopy; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
1978 Ultrasonics Symposium
Type
conf
DOI
10.1109/ULTSYM.1978.197033
Filename
1533973
Link To Document