Title :
Improvement in the Resolution of the Reflective Scanning Acoustic Microscope Application to the Non Destructive Evaluation in Microelectronics
Author :
Attal, J. ; Cambon, G.
Keywords :
Absorption; Acoustic applications; Acoustic signal detection; Acoustic transducers; Frequency; Lenses; Liquids; Microelectronics; Microscopy; Temperature;
Conference_Titel :
1978 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1978.197033
