Title :
The magnetron method of producing large area multilayer photo-electric converters
Author_Institution :
Dept. of Radio Phys., Tauric Nat. Univ., Simferopol, Ukraine
Abstract :
On the basis of the method of magnetron sputtering the ways of obtaining and designing photovoltaic cells for the creation of large area solar cells with a bedded structure have been researched. A method of producing photoelectric p-i-n-structures on the basis of amorphous silicon within a single vacuum cycle is proposed.
Keywords :
amorphous semiconductors; elemental semiconductors; photovoltaic cells; semiconductor growth; semiconductor thin films; silicon; solar cells; sputter deposition; Si; amorphous Si deposition; bedded structure; large area photoelectric converters; large area solar cells; magnetron sputtering; multilayer photoelectric converters; photoelectric p-i-n-structures; photovoltaic cells; Bismuth; Helium; Magnetic multilayers;
Conference_Titel :
Microwave Conference, 2000. Microwave and Telecommunication Technology. 2000 10th International Crimean
Conference_Location :
Crimea, Ukraine
Print_ISBN :
966-572-048-1
DOI :
10.1109/CRMICO.2000.1256232
