Film Bulk Acoustic-Wave Resonator based radiation sensor

Author

Oiler, Jonathon ; Qiu, Xiaotun ; Zhu, Jie ; Wang, Ziyu ; Yu, Cunjiang ; Barnaby, Hugh ; Holbert, Keith ; Yu, Hongyu

Author_Institution

Sch. of Earth & Space Exploration, Arizona State Univ., Tempe, AZ, USA

fYear

2010

fDate

20-23 Jan. 2010

Firstpage

967

Lastpage

970

Abstract

This paper describes a high-energy electromagnetic wave radiation detection device using zinc oxide (ZnO) based Film Bulk Acoustic-Wave Resonator (FBAR). The resonant frequency of the FBAR decreased after gamma radiation, with the peak sensitivity of 9.3 kHz/krad and minimum detectable dosage of 218 rad occurring at the lowest experimental dose of 20 krad (all dosages are calibrated with ZnO), while the sensitivity decreased with increasing total ionizing dosage. The incident radiation generated charges that was trapped near the ZnO-silicon nitride (SiN) interface, which increased the plate capacitance of the FBAR, resulting in the decrease of resonant frequency.

Keywords

acoustic resonators; bulk acoustic wave devices; gamma-rays; radiation detection; radiation hardening (electronics); silicon compounds; zinc compounds; FBAR plate capacitance; FBAR resonant frequency; SiN; ZnO; electromagnetic wave radiation detection; film bulk acoustic wave resonator; gamma radiation; incident radiation; radiation sensor; total ionizing dosage; Film bulk acoustic-wave resonator; dosimeter; frequency shift; radiation sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on

Conference_Location

Xiamen

Print_ISBN

978-1-4244-6543-9

Type

conf

DOI

10.1109/NEMS.2010.5592605

Filename

5592605