Title :
Scanning near-field optical microscopy, spectroscopy and nanolithography
Author :
Dryakhlushin, V.F.
Author_Institution :
Inst. for Phys. of Microstructures, Russian Acad. of Sci., Nizhny Novgorod, Russia
Abstract :
A review of the latest developments in the scanning near-field optical microscopy, spectroscopy and nanolithography is presented. The possibility of obtaining images of different semiconductor, microelectronic and microbiology structures with the resolution exceeding the diffraction limit is shown. The investigation of local energy and geometry properties of sample surfaces is discussed, including concentration, diffusion length and carrier charge spectra, mapping of the emitting surfaces of semiconductor lasers, near-field photoconductivity, propagation and transformation of surface plasmons at the resolution below 100 nm. Techniques of fabricating objects with /spl les/30-50 nm dimensions are discussed.
Keywords :
nanolithography; near-field scanning optical microscopy; semiconductor lasers; spectroscopy; surface plasmons; carrier charge spectra; emitting surface; geometry property; image resolution; microbiology structure; microelectronic structure; nanolithography; photoconductivity; scanning near-field optical microscopy; semiconductor laser; spectroscopy; surface plasmon propagation; Energy resolution; Geometrical optics; Image resolution; Microelectronics; Nanolithography; Optical diffraction; Optical microscopy; Semiconductor lasers; Spectroscopy; Surface emitting lasers;
Conference_Titel :
Microwave and Telecommunication Technology, 2003. CriMiCo 2003. 13th International Crimean Conference
Conference_Location :
Sevastopol, Crimea, Ukraine
Print_ISBN :
966-7968-26-X
DOI :
10.1109/CRMICO.2003.158733
