DocumentCode
2435680
Title
High Q and GHz SAW Resonators
Author
Tanski, William J.
fYear
1978
fDate
1978
Firstpage
433
Lastpage
437
Keywords
Acoustic diffraction; Acoustic reflection; Acoustic transducers; Conductivity; Electrodes; Etching; Resonant frequency; Surface acoustic waves; Viscosity; Yield estimation;
fLanguage
English
Publisher
ieee
Conference_Titel
1978 Ultrasonics Symposium
Type
conf
DOI
10.1109/ULTSYM.1978.197076
Filename
1534016
Link To Document