Ion energy spread measurements of inductively coupled plasma ion source

Summary form only given. Ions with low energy spread find immense applications in many fields such as FIB, SIMS, ion beam lithography etc. The work has been started to design an efficient and compact plasma based ion source for the application of FIB. It is aimed to generate very low energy spread ions of various gaseous and metallic species. A 13.56 MHz mini Inductively coupled plasma ion source has been designed with 30 mm diameter quartz tube and external helical antenna. Ions are extracted using three electrode extraction system. An effort has been made to reduce the ion energy spread by various techniques such as faraday shielding, application of magnetic fields, etc. Ion energy spread measurements are carried out using retarding field energy analyzer (RFEA) with four grids. In this paper design of ion source, RFEA and experimental results are explained.