Title :
Pseudospark discharge as a source of EUV radation in a vicinity of 13.5 NM
Author :
Korolev, Yu.D. ; Shemyakin, I.A. ; Frants, O.B. ; Geyman, V.G. ; Landl, N.V. ; Ivashov, R.V.
Author_Institution :
Inst. of High Current Electron., Tomsk
Abstract :
This paper presents the results of investigations of the pseudospark discharge in the systems for EUV generation with a high pulse repetition rate. The data on the temporal development of the discharge and on correlation of the temporal discharge stages with the EUV radiation are presented. Mechanism of formation the plasma blob that irradiates EUV is discussed.
Keywords :
plasma production; plasma properties; sparks; ultraviolet sources; EUV generation; plasma blob; pseudospark discharge; pulse repetition rate; temporal discharge; Anodes; Cathodes; Discharges; Fault location; Optical pumping; Plasma diagnostics; Plasma sources; Pulse generation; Radio access networks; Ultraviolet sources;
Conference_Titel :
Plasma Science, 2008. ICOPS 2008. IEEE 35th International Conference on
Conference_Location :
Karlsruhe
Print_ISBN :
978-1-4244-1929-6
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2008.4590701
