DocumentCode :
2436168
Title :
High Frequency SAW Devices on AlN/Al2O3
Author :
Kagiwada, R.S. ; Yen, K.H. ; Lau, K.F.
fYear :
1978
fDate :
25-27 Sept. 1978
Firstpage :
598
Lastpage :
601
Keywords :
Acoustic measurements; Acoustic waves; Aluminum nitride; Frequency; Hydrogen; Substrates; Surface acoustic wave devices; Surface acoustic waves; Temperature; Velocity measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1978 Ultrasonics Symposium
Conference_Location :
Cherry Hill, NJ, USA
Type :
conf
DOI :
10.1109/ULTSYM.1978.197110
Filename :
1534050
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2436168
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