Polymerization and nano composite deposition by atmospheric pressure plasma (APPECVD)

Author

Gulec, Ali ; Oksuz, Lutfi ; Uygun, Aysegul

Author_Institution

Fac. of Sci. & Art, Dept. of Phys., Suleyman Demirel Univ., Isparta

fYear

2008

fDate

15-19 June 2008

Firstpage

1

Lastpage

1

Abstract

A dielectric barrier atmospheric pressure RF plasma system has been built using 13.56 MHz RF source with an homemade matching unit. A RF glow discharge is obtained with the helium flow and furan is introduced to the system. Polyfuran deposition is obtained onto glass and the characteristics of thin film are analyzed. In the same experimental setup, polythiophene and polyfuran composites are deposited in the presence of TiO₂ nano particles. The morphological, chemical structure, thermal and electrical characteristics are investigated. The plasma polymerization indicated different results than the conventional polymerization of similar thin films.

Keywords

filled polymers; glow discharges; nanocomposites; particle reinforced composites; plasma CVD; polymer films; polymerisation; titanium compounds; RF glow discharge; RF plasma system; TiO₂; atmospheric pressure plasma; chemical characteristics; dielectric barrier; electrical characteristics; frequency 13.56 MHz; morphological characteristics; nanocomposite deposition; nanoparticles; polyfuran deposition; polymerization; structure characteristics; thermal characteristics; Atmospheric-pressure plasmas; Dielectric thin films; Glass; Glow discharges; Helium; Plasma properties; Plasma sources; Polymer films; Radio frequency; Sputtering;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 2008. ICOPS 2008. IEEE 35th International Conference on

Conference_Location

Karlsruhe

ISSN

0730-9244

Print_ISBN

978-1-4244-1929-6

Electronic_ISBN

0730-9244

Type

conf

DOI

10.1109/PLASMA.2008.4590731

Filename

4590731