Title :
Eletronical and optical characteristics of atmospheric pressure plasma enhanced chemical vapor deposition (APPECVD) system
Author :
Oksuz, Lutfi ; Gulec, Ali ; Ozaltin, K. ; Akkaya, Kadir ; Erkmen, Gokhan ; Uygun, Aysedul
Author_Institution :
Dept. of Phys., Suleyman Demirel Univ., Isparta
Abstract :
A dielectric barrier atmospheric pressure plasma discharge system with 13,56 MHz rf power supply and matching unit is built for plasma enhanced chemical vapor and composite deposition purposes. Plasma system is optimized for maximum power transfer by homemade matching circuit and uniform glow discharge is obtained with helium and argon flow. The optical, invasive electrical probe and noninvasive electrical characteristics are examined with and without monomer flow to the system. Time resolved ICCD pictures and electrical characteristics will be given with and without of monomers introduced to the system for polymerization.
Keywords :
plasma CVD; polymerisation; APPECVD; atmospheric pressure plasma enhanced chemical vapor deposition; composite deposition purposes; dielectric barrier atmospheric pressure plasma discharge system; electrical properties; frequency 13.56 MHz; noninvasive electrical characteristics; optical properties; polymerization; time resolved ICCD pictures; Atmospheric-pressure plasmas; Chemical vapor deposition; Circuits; Dielectrics; Electric variables; Glow discharges; Helium; Plasma chemistry; Plasma properties; Power supplies;
Conference_Titel :
Plasma Science, 2008. ICOPS 2008. IEEE 35th International Conference on
Conference_Location :
Karlsruhe
Print_ISBN :
978-1-4244-1929-6
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2008.4590732
