Title :
Low Temperature Processing Of Coil Insulating Photoresist By Electron Beam Irradiation
Author :
Jennison, M.J. ; Young K.Kim
Author_Institution :
Quantum Corp.
Keywords :
Anisotropic magnetoresistance; Coils; Curing; Electron beams; Giant magnetoresistance; Insulation; Magnetic heads; Plasma temperature; Resists; Temperature sensors;
Conference_Titel :
MMM-Intermag Conference, 1998. Abstracts., The 7th Joint
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-5118-5
DOI :
10.1109/INTMAG.1998.735681
