Title : 
Low profile integrated passive devices with 3D high density capacitors ideal for embedded and die stacking solutions
         
        
            Author : 
Bunel, Catherine ; Pommier, Mickael ; Jacqueline, Sebastien
         
        
            Author_Institution : 
IPDIA Stephan Borel, CEA LETI
         
        
        
        
        
        
            Abstract : 
• The low profile IPDIA technology capability is limited by the density of the trench capacitor, more explicitly by the depth of the trench. • The 80μm Low Profile node dedicated to the highest capacitor density is qualified. • IPDIA is providing the lowest profile 3D Silicon capacitors with a superior stability and reliability over a wide temperature range. • Ideal solution where volume and weight are major concerns.
         
        
        
        
            Conference_Titel : 
Electronic System-Integration Technology Conference (ESTC), 2012 4th
         
        
            Conference_Location : 
Amsterdam, Netherlands
         
        
            Print_ISBN : 
978-1-4673-4645-0
         
        
        
            DOI : 
10.1109/ESTC.2012.6542168