Author :
Phommahaxay, Alain ; Jourdain, Anne ; Verbinnen, Greet ; Woitke, Tobias ; Stieber, Ralf ; Bisson, Peter ; Gabriel, Markus ; Spiess, Walter ; Guerrero, Alice ; McCutcheon, Jeremy ; Puligadda, Rama ; Bex, Pieter ; Van den Eede, Axel ; Swinnen, Bart ; Beyer,
Author_Institution :
imec, Kapeldreef 75, 3001 Leuven, Belgium
Abstract :
Among the technological developments pushed by the emergence of 3D Stacked IC technologies, temporary wafer bonding and thinning have become key elements in device processing over the past years. While these elements are now mature enough for high-volume manufacturing, thin wafer debonding and handling still remain challenging. Hence this work focuses on extensive characterization of a thermal debonding approach to answer these challenges.
