DocumentCode
2438004
Title
Model simplification for accelerating simulation-based evaluation of dispatching rules in wafer fabrication facilities
Author
Chiang, Tsung-Che
Author_Institution
Dept. of Comput. Sci. & Inf. Eng., Nat. Taiwan Normal Univ., Taipei, Taiwan
fYear
2010
fDate
7-10 Dec. 2010
Firstpage
2005
Lastpage
2011
Abstract
Dispatching rules are widely used for scheduling of wafer fabrication facilities, and simulation is a popular tool for evaluation of rules. A main weakness of simulation is the long computation time. In this paper, we aim at simplifying the models of fabrication facilities to reduce simulation time and meanwhile keep the ability of evaluating rules correctly. We propose a metric to assess how well a simplified model evaluates rules and formulate the model simplification problem as a multiobjective optimization problem. We also develop an evolutionary algorithm to solve the formulated problem. Experimental results show that simplified models generated by the proposed algorithm can save half of simulation time and select high-performance rules.
Keywords
evolutionary computation; production facilities; scheduling; semiconductor industry; dispatching rules; evolutionary algorithm; model simplification; multiobjective optimization problem; simulation-based evaluation; wafer fabrication facility scheduling; Accuracy; Computational modeling; Dispatching; Mathematical model; Optimization; Semiconductor device modeling; Workstations; dispatching rules; evolutionary algorithm; model simplification; multiobjective; simulation; wafer fabrication;
fLanguage
English
Publisher
ieee
Conference_Titel
Control Automation Robotics & Vision (ICARCV), 2010 11th International Conference on
Conference_Location
Singapore
Print_ISBN
978-1-4244-7814-9
Type
conf
DOI
10.1109/ICARCV.2010.5707840
Filename
5707840
Link To Document