• DocumentCode
    2438004
  • Title

    Model simplification for accelerating simulation-based evaluation of dispatching rules in wafer fabrication facilities

  • Author

    Chiang, Tsung-Che

  • Author_Institution
    Dept. of Comput. Sci. & Inf. Eng., Nat. Taiwan Normal Univ., Taipei, Taiwan
  • fYear
    2010
  • fDate
    7-10 Dec. 2010
  • Firstpage
    2005
  • Lastpage
    2011
  • Abstract
    Dispatching rules are widely used for scheduling of wafer fabrication facilities, and simulation is a popular tool for evaluation of rules. A main weakness of simulation is the long computation time. In this paper, we aim at simplifying the models of fabrication facilities to reduce simulation time and meanwhile keep the ability of evaluating rules correctly. We propose a metric to assess how well a simplified model evaluates rules and formulate the model simplification problem as a multiobjective optimization problem. We also develop an evolutionary algorithm to solve the formulated problem. Experimental results show that simplified models generated by the proposed algorithm can save half of simulation time and select high-performance rules.
  • Keywords
    evolutionary computation; production facilities; scheduling; semiconductor industry; dispatching rules; evolutionary algorithm; model simplification; multiobjective optimization problem; simulation-based evaluation; wafer fabrication facility scheduling; Accuracy; Computational modeling; Dispatching; Mathematical model; Optimization; Semiconductor device modeling; Workstations; dispatching rules; evolutionary algorithm; model simplification; multiobjective; simulation; wafer fabrication;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Control Automation Robotics & Vision (ICARCV), 2010 11th International Conference on
  • Conference_Location
    Singapore
  • Print_ISBN
    978-1-4244-7814-9
  • Type

    conf

  • DOI
    10.1109/ICARCV.2010.5707840
  • Filename
    5707840